Article or book title, author's surname, DOI

2012

  1. Modeling ultraviolet lithography processes immersion stage design advances Nanotechnology : the development , application - XXI Century, No. 3, 2012 pp. 6-11
  2. Fabrication of field-emission and tunneling NANO-microdevices cathodes, SOME features of technology Наноматериалы и наноструктуры - XXI век, No. 2, 2012 pp. 35-43
  3. Modeling ultraviolet lithography processes immersion stage design advances Nonlinear World, No. 7, 2012 pp. 454-460