A.M. Mikhal'kov

2010

1. The Quality Test of Dielectric Layers of Integrated Circuits and Products of Microsystem Engineering Вакуумная, плазменная и твердотельная электроника, No. 1, 2010 pp. 44-52
2. The quality test of dielectric layers of integrated circuits and products of microsystem engineering Science Intensive Technologies, No. 7, 2010 pp. 44-52