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Radioengineering
Antennas
Achievements of Modern Radioelectronics
Electromagnetic Waves and Electronic Systems
Biomedical Radioelectronics
Neurocomputers
Science Intensive Technologies
Information-measuring and Control Systems
Nonlinear World
Technologies of Living Systems
Highly available systems
Dynamics of Complex Systems - XXI century
Nanotechnology : the development , application - XXI Century
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А. А. Жуков
A. A. Zhukov
А. А. Жуков
1 articles
2009
Information-measuring and Control Systems
1
2009
Formation of executive elements of microsystem technics devices by etching in inductive-connected plasma
Information-measuring and Control Systems, No. 8, 2009
pp. 94-97
