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Radiotekhnika
RUEN
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Article or book title, author's surname, DOI

K. A. Vorotilov

К. А. Воротилов

1 articles 2009

2009

  1. SOL-GEL MESOPOROUS SILICATES FOR VLSI MULTILEVEL INTERCONNECTIONS AND MEMS TECHNOLOGY Science Intensive Technologies, No. 11, 2009 pp. 37-43
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