K.N. Bugorkov

К.Н. Бугорков

3 articles 2020–2024

Nanotechnology : the development , application - XXI Century 3

2024

Analysis of high-frequency discharge during plasma chemical etching of quartz glass with sulfur hexafluoride Nanotechnology : the development , application - XXI Century, No. 2, 2024 pp. 54-71

2023

Plasma-chemical etching of quartz glass by sulfur hexafluoride Nanotechnology : the development , application - XXI Century, No. 3, 2023 pp. 32-46

2020

Calculation of electromagnetic field of spiral antenna of plasma chemical etching unit Nanotechnology : the development , application - XXI Century, No. 1, 2020 pp. 29-42