Yu.L. Shikolenko - Post-graduate Student, Moscow State University of Information Technologies, Radio Engineering and Electronics (MIREA)

The article presents investigation of depending contact sensitivity on cantilevers tip radius and material. Charge resolution ability of scanning capacitance microscopy mode and its lateral resolution in flash cell failure analysis are defined. Analysis of the results showed the ability to apply the method in the diagnosis of memory cells with charge 1.6-10⁻¹⁶ C.

 

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