350 rub
Journal Radioengineering №9 for 2010 г.
Article in number:
Liquid Sensing Using Surface Acoustic Waves
Authors:
I.V. Anisimkin, Yu.V. Gulyaev, V.I. Anisimkin
Abstract:
Knowledge on real properties of liquid media and internal processes associated with chemical, biological, and physical transformations are currently needed for many branches of science and industry. Because of that, a number of electronic sensors based on various physical principles are developed in many countries. One of them, considering as most attractive, is relied upon acoustic wave propagation along interface between solid wafer and test liquid, penetrating the wave form the wafer into the liquid, and recording the changes in the wave amplitude or phase due to liquid loading. Usually, acoustic sensors operate at 10-100 MHz and acoustic amplitudes 1 nm. Typical thickness of the layer probed by the wave in the liquid is about 1 μm of interface. This article reviews recent achievements in acoustic waves sensing. Different papers are classified both by mechanisms of the sensing (mass loading, electric loading, viscous interaction, thermal variation) and the type of the wave (Rayleigh, Lamb, shear-horizontal, leaky, bulk). As examples, the measurements of the liquid density, viscosity, dielectric permittivity, temperature, evaporation heat, evaporation rate, ion cell and virus concentrations as well as the real-time monitoring different processes such as acids dissociation, protein reactions, liquid-phase adsorption, phase-transitions, liquid heating, liquid cooling, droplet evaporation, seed germination, chemical and biological reactions are reviewed. Finally, advantages and disadvantages of the acoustic wave sensing are discussed and probable outlooks are estimated.
Pages: 9-31
References
  1. Сегре Э.. Энрико Ферми.Физик // М.: Мир. 1973. С. 37.
  2. Kostial P.Surface Acoustic Wave Control of the Ion Concentration in Water // Appl. Acoustics. 1994. V. 41. P.187-193.
  3. Kostial P., Machalikova J., CernobilaF. Using an Immersion Surface Acoustic Wave Sensor for Liquid Testing // J.Phys III France. 1993. No. 3. P.355-362.
  4. Kostial P., Machalikova J., KaniokJ. The Application of Surface Acoustic Waves for the Study of Liquids // Acta Phys. Slov. 1993. V.43. No.3. P.169-176.
  5. Kostial P., MachalikovaJ. Surface Acoustic Wave Diagnisis of Oil Wearing // Acta Acustica. 1993. No. 1. P. 119-122.
  6. Ricco A.J., MartinS.J.Acoustic Wave Viscousity Sensor // Appl.Phys.Lett. 1987. V.50. No.21. P.1474-1478.
  7. Hughes R.C., Martin S.J., Frye G.C., Ricco A.J. Liquid-Solid Phase Transition Detection with Acoustic Plate Mode Sensors:Application to Icing of Surfaces// Sensors & Actuators. 1990. V. A21-A23. P.693-699.
  8. Moritake H., Inoue M., TodaK. Liquid Viscousity Measurement Uzing Plate Mode Shear Horizontal Waves on a Piezoelectric Ceramic Thin Plate// Jpn. J. Appl.Phys. 1997. V. 36. P.6088-6091.
  9. Moriizumi T., Unno Y., Shiokawa S. ew Sensor in Liquid Using Leaky SAW// Proc. IEEE Ultrasonic Symposium. 1987. P. 579-582.
  10. Martin S.J., Ricco A.J., HughesR.C. Acoustic Wave Devices for Sensing in Liquids //Proc. 4th Internat. Conf. On Solid-State Sensors and Actuators. 1987.P.478-481.
  11. Shana Z.,Josse F. Analysis of Liquid-Phase_based Sensors Utilizing SH Surface Waves On Rotated Y-Quartz// Proc. Ultrasonic Symp. 1990. P.123-126.
  12. Nomura T., Yasuda T. Measurement of Acoustic Properties of Liquids Using SH-type Surface Acoustic Waves // Proc. IEEE Ultrasonic Symp. 1990. P.307-310.
  13. Martin B.A., Wenzel S.W., WhiteR.H.  Viscousity and Density Sensing with Ultrasonic Plate Waves// Sensors & Actuators. 1990. V. A21-A23. P.704-708.
  14. Furukawa S., Furukawa H., Nomura T., Yasuda T., Tamura M. Precise Estimation of Viscosity of Liquid Using Leaky Surface Acoustic Waves Propagating Along Liquid/Polymer/LiNbO3 Structures // Proc. IEEE Ultrasonics. Symp. 1992. P.303-306.
  15. Nomura T., Yasuda T., FurukawaS. One-Port Surface Acoustic Wave Resonator for Sensing in Liquids // Proc. IEEE Ultrasonics Symp. 1992. P.299-302.
  16. Hauden D., Hoummady M., Choujaa A., BastienF. Acoustic Wave Sensors - Quartz Technological Channel and Silicone Tecnology // Proc. IEEE Ultrasonics Symp. 1992. P.310-313.
  17. Jakoby B., VellekoopM.J.Viscous Losses of Shear Waves in Layered Structures Used for Biosensing // Proc. IEEE Ultrasonics Symp. 1998. P. 90 -93.
  18. Teston F., Tessier L., Feuillard G., Richard E., Roncin A., Lethiecq M. The Multi-layered Effective Permittivity Function Applied To the Mass Loading And Viscous Coupling In Shear Horizontal-Acoustic Plate Modes // Sensors & Actuators. 1999. V.B 59. P.171-176.
  19. Herrmann F., WeihnachtM.Sensor Based On Shear-Horizontal Surface Acoustic Waves in Layered Quartz/SiO2 and LiTaO3/ SiO2 Structures // Proc. IEEE Ultrasonics Symp. 1999. P.413-416.
  20. Calabrese G.S., Wohltjen H., RoyM.K. Surface Acoustic wave Devices as Chemical Sensors in Liquids. Evidence Disputing the Importance of Rayleigh Wave Propagation //Anal.Chem. 1987. No.59. P.833-837.
  21. KostialP.Surface Acoustic Wave Measurements of Evaporation Rate // Appl. Acoustics. 1996. V.47. No. 2 P.121-127.
  22. Hou J., van de VaartH.Mass Sensitivity of Plate Modes In Surface Acoustic Wave Devices And Their Potential As Chemical Sensors // Proc. IEEE Ultrasonic Symp. 1987. P. 573-575.
  23. Wenzel S.Wl, White R.V. A Multisensor Employing an Ultrasonic Lamb-Wave Oscillator // IEEE Trans.Electron. Devices. 1988. V. 35. No.6. P.735-743.
  24. Andle J., Vetelino J., Lade M., McAllisterD.  Detection of Nucleic Acid Hybridization With an Acoustic Plate Mode Microsensor // Proc. IEEE Ultrasonics Symp. 1990. P.291-294.
  25. Andle J.C., Vetelino J.F.,.Lade M.W, McAllister D.J. An Acoustic Plate Mode Biosensor // Sensors & Actuators. 1992. V. B.8. P.191-198.
  26. Rajendran V., Koike M., HashimotoK. Mass Density Sensor For Liquids Using ZnO - Film/Al - Foil Lamb Wave Device // Proc. IEEE Ultrasonic Symp. 1992. P.263-268.
  27. Andle J.C., Weaver J.T., Vetelino J.F., McAllister D.J. Selective Acoustic Plate Mode DNA Sensor // Sensors & Actuators. 1995. V.B 24-25. P.129-133.
  28. Josse F., Andle J.C., Vetelino J.F., Dahint R., GrunzeM. Theoretical and Experimental Study of Mass Sensitivity of PSAW-APMs on ZX-LNO // IEEE Trans. Ultras. Ferroel. Frequency Control. 1995. V.42. No.4. P.749-755.
  29. Josse F., Dahint R., Schumacher J., Grunze M., Andle J.C., VetelinoJ. On the Mass Sensitivity of Acoustic-Plate-Mode Sensors // Sensors & Actuators. 1996. V.A53. P.243-248.
  30. Seigel R.R., Harder P., Dahint R., Grunze M., Josse F., Mrksich M., WhitesidesG. On-Line Detection of Nonspecific Protein Adsorption at Artificial Surfaces //Anal. Chem. 1997. V.69. No.16. P.3321-3328.
  31. Teston F., Feuillard G., Tessier L., LethiecqM. Mass Sensitivity of Acoustic Plate Mode in Liquids // IEEE Trans. Ultrason., Ferroel. Frequency Control. 1998. V. 45. No.5. P. 895-899.
  32. Dahint R., Bender F., Morhard F. Operation of Acoustic Plate Mode Immunosensors in Complex Biological Media // Anal. Chem. 1999. No. 71. P.3150-3156.
  33. Bender F., Dahint R., Josse F., Ricco A.J., MartinS.J. Characteristics of Acoustic Plate Modes on Ratated Y-Cuts of Quartz Utilized for Biosensing Applications // Anal. Chem. 1999. No.71. P.5064-5068.
  34. Esteban I., Dejous C., Rebiere D., Pistre J., PlanadeR. Study of the Mass Sensitivity of SH-APM Sensors with Maple V // Sensors & Actuators. 1999. V.76. P.43-50.
  35. Andle J.C., Vetelino J.F., Lec R., McAllisterD.J. An Acoustic Plate Mode Immunosensor // Proc. IEEE Ultrasonics Symp.1989. P.579-584.
  36. Rapp M., Moss D.A., Reichert J., AcheH.J. Acoustoelectric Immunosensor Based On Surface Transverse Waves for In Situ Measurements In Water // Proc.7thIntern.Conference on Solid-State Sensors and Actuators. 1990. P.90-93.
  37. Gizeli E., Goddard N.J., Lowe C.R., Stevenson A.C. A Love Plate Biosensor Utilizing a Polimer Layer // Sensors & Actuators. 1992. V. B 6. P.131-137.
  38. Kovacs G., Venema A. Theoretical Comparison Of Sensitivities Of Acoustic Shear Wave Modes For (Bio)chemical Sensing In Liquids//Appl.Phys.Lett. 1992. V.61. No.6. P.639-641.
  39. Kovacs G., Lubking G.W., Vellekoop M.J., Venema A. Love Waves for (Bio)chemical  Sensing in Liquids // Proc. IEEE Ultrasonics Symp. 1992. P.281-285.
  40. Baer R.L., Flory C.A., .Tom-Moy M., Solomon D.S. STW Chemical Sensors // Proc. IEEE Ultrasonics Symp. 1992. P. 293-298.
  41. Kovacs G., Vellekoop M.J., Haueis R., Lubking G.W., Venema A. A Love Sensor for (Bio)chemical Sensing In Liquids // Sensors & Actuators. 1994. V.A 43. P.38-43.
  42. Hunklinger S., Schikfus M.V. Chemical Sensing in Gases and Liquids with Surface Acoustic Devices // Proc. IEEE Ultrasonics Symp. 1993. P.310-313.
  43. Tom-Moy M., Baer R.L., Spira-Solomon D., Doherty T.P. trazine Measurements Using Surface Transverse Wave Devices // Anal. Chem. 1995. V. 67. P. 1510-1516.
  44. Welsch W., Klein C., Schikfus M.V.,.Hunklinger S. Development of Surface Acoustic Wave Immunosensor // Anal. Chem. 1996. V. 68. P.2000-2004.
  45. Gizeli E., Lowe C.R., Liley M., Vogel H. Detection of Supported Lipid Layers With the Acoustic Love waveguide device: Application to Biosensors // Sensors & Actuators. 1996. V. B 34. P.295-300.
  46. Du J., Harding G.L., Ogilvy J.A., Dencher P.R., Lake M. A Study of Love-Wave Acoustic Sensors // Sensors & Actuators. 1996. V.A 56. P.211-219.
  47. Schikfus M.V., Welsch W., Weib M., Hunklinger S. Biosensing With Surface Acoustic Wave Devises // Proc. IEEE Ultrasonics Symp. 1996. P.310-313.
  48. Gizel E.i, Liley M.,.Lowe C.R, VogelH. Antibody Binding to a Functionalized Supported Lipid Layer: A Direct Acoustic Immunosensor// Anal. Chem. 1997. V. 69. P.4808-4813.
  49. Freudenberg J., Schelle S., Beck K., Schickfus M.V., Hunklinger S. A Contact less Acoustic Wave Biosensor // Proc. IEEE Ultrasonics Symp. 1997. P.90-93.
  50. Du J., Harding G.L. A Multilayer Structure for Love-mode Acoustic Sensors // Sensors & Actuators. 1998. V. A 65. P. 152-159.
  51. Cowan S.E., Black J., Keasling J.D., White R.M.Ultrasonic Flexural-Plate-Wave Sensor for Detecting the Concentration of Settling E.Coli W3110 Cells // Anal. Chem. 1999. No.71. P. 3622-3625.
  52. Niemczyk T.M., Martin S.J., Frye G.S.,.Ricco A.J. Acoustoelectric Interaction of Plate Modes With Solutions // J.Appl.Phys. 1988. V.64. No.10. P.5002-5008.
  53. Martin S.J., Ricco A.J., Niemczyk T.M., Frye G.C.Characterization of SH-Acoustic Plate Mode Liquid Sensors// Sensors & Actuators. 1989. V. 20. P.253-268.
  54. Dejous C., Savar M.t, Rebiere D., PistreJ. A Shear-horizontal Acoustic Plate Mode (SH-APM) Sensor for Biological Media // Sensors & Actuators. 1995. V.B 26-27. P.452-456.
  55. Caliendo C., D`Amico A., Verardi P., Verona E. - K+Detection Using Shear Horizontal Acoustic Modes //Proc. IEEE Ultrasonic Symp. 1990. P.383-387.
  56. Baer R.L., Flory C.R. Some Limitations on the Use of LeakySAW Mode Sensors in Liquids // Proc. IEEE Ultrason. Symposium. 1991. P.279-284.
  57. Kondoh J., Nakamura M., Matsui Y., ShiokawaS. Water Recognition Using SH-SAW Sensors // Proc. IEEE Ultrasonic Symposium. 1991. P.390-393.
  58. Shiokawa S., Kondoh J., MatsuiY. Application of Liquid Phase SH-SAW Sensor for Biosensing and Taste Sensor // Proc. IEEE Ultrason. Symposium. 1991. P.270-273.
  59. Kondoh J., Matsui Y., Shiokawa S., Wlodarski W.B. Enzyme-immobilized SH-SAW biosensor // Sensors & Actuators. 1994. V.B 20. P.199-203.
  60. Kondoh J., Saito K., Shiokawa S., Suzuki H. Multichannel Shear Horizontal Surface Acoustic Wave Sensor for Liquid Characterization // Proc.IEEE Ultrason. Symp. 1995. P.445-449.
  61. Kondoh J., Yogi S., Hayashi S., Shiokawa S .Measurement Of Complex Permittivity Using a Surface Wave Liquid-Phase Sensor// Proc. World Congress on Ultrasonics, Yokohama. 1997. P.94-95.
  62. Yamazaki T., Kondoh J., Matsui Yi, ShiokawaS. Estimation of Components аnd Concentrations in Mixture Solutions оf Electrolytes Using а Liquid Flow System With Acoustic Wave Sensor // Proc. IEEE Ultrason. Symp. 1998. P.73-76.
  63. Kondoh J., Yamazaki T., Matsui Y., ShiokawaS. Identification of Ion Species in Electrolitic Solutions Using Surface Acoustic Wave Liquid Flow Sensing System Based on New Pattern Recognition Method //Proc. IEEE Ultrason. Symp. 1999. P.471-476.
  64. Nomura T., Saitoh A., Horikoshi Y., FurukawaS. Liquid Sensing System Based On Two Port SH-SAW Resonator // Proc. IEEE Ultrason. Symp. 1999. P.477-480.
  65. Shiokawa S., KondohJ.Surface Acoustic Wave Sensor For Liquid-Phase Application //Proc. IEEE Ulyrason. Symp. 1999. P.445-452.
  66. Joshi S.G., JinY. Use Of a SAW Device For Measuring Flow Rate Of Liquids // Proc. IEEE Ultrason. Symp. 1990. P.319-321.
  67. Anisimkin I.V., Anisimkin V.I., Gulyaev Yu.V., Cimmino A., Verona E. Multichannel Acoustic Tool for Sensing in Liquid Microdroplets // Proc. IEEE Ultrason. Symp. 2000. P.713-716.