V.I. Anisimkin - Dr.Sc. (Phys.-Math.), Chief Research Scientist, Kotel-nikov IRE RAS (Moscow) E-mail: anis@cplite.ru М.А. Zemlyanitsin - Leading Engineer, Kotel-nikov IRE RAS (Moscow) V.А. Оsipenko - Senior Research Scientist, Acoustoelectronic and Piezokeramic ELPA Corporation (Moscow)

Novel gas sensitive element consisted of resistor-type high-temperature gas sensor as a heater and surface acoustic wave delay line as temperature detector both integrated on a single substrate is suggested and developed. The element provides gas detection together with analog (the change in electric resistivity of the heater) to digital (the change in the wave frequency and/or phase) signal transformation at the same time. Using oxygen as a test gas it is demonstrated that response of the novel element is an order of value higher as compared with the similar element basing on thermal conductivity effect only.

 

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