V.I. Kryuchatov

Article is devoted to development of test structure and the mathematical model, allowing to carry out theoretical and experimental researches of errors of resistance of the resistors arising during their manufacturing at the account not only deviations of specific superficial resistance of a resistive film and geometrical parameters of resistors, but also sizes of transitive resistance of the contacts arising on border between resistive and conductive films. Recommendations for a choice of geometrical parameters of test structure are given. The formula for calculation of contact resistance on the measured sizes of resistance of resistors and a regular error of length is received. Experimental check of the developed mathematical model is lead by comparison of sizes of the errors received by direct measurements of constructive - technological parameters of resistors and calculation on offered model. Thus the divergence of the data did not exceed 10 %. With use of the offered model the data on sizes of errors of constructive - technological parameters of thin-film resistors and empirical dependences of size casual deviations of contact resistance from width of resistors for the concrete technology used at the enterprise are received. These data are applied at the enterprise at constructive calculation of resistors in view of industrial errors to maintenance of the set fields of admissions at their manufacturing