S.S. Antsyferov  Dr.Sc. (Eng.), Professor, MGTU MIREA. E-mail: Antsyfer@yandex.ru
K.E. Rusanov  Ph.D. (Eng.), Associate Professor, MGTU MIREA. E-mail: rusanov@mirea.ru

For a quantitative estimation of morphological characteristics of a two-dimensional nanostructures is necessary to conduct a large number of measurements. This is due to the effect of a number of confounding factors, such as contrast fluctuations of images of nanostructures, significant variations of the intensity in localized areas of the image due to the action of quantum noise, etc. All this causes an error fatal during measurements that has a significant impact on the confidence level of the identification of nanostructures. In General localization processes of a morphological characteristics of a two-dimensional nanostructures are uncertain, probabilistic, and the task of developing of methodology for ensuring the uniformity of measurements of parameters of nanostructures and standardization of procedures of quality management of these processes is very important. In addressing this task, the basis put information criterion, according to which the decision of the measured value is only possible when the informative measure of the obtained result is a set of probability threshold. The purpose of work is the establishment of analytical ratios, allowing to estimate the expected number of measurements needed to provide the desired confidence level for the identification of the morphology of nanostructures. The analytical expressions allowing to estimate the expected number of measurements in a mode of consecutive low-informative supervision are established.