Yu.V. Podgorny - Ph.D. (Eng.), Leading Research Scientist, Head of Department of REC «Technological Center», Moscow Technological University. Е-mail: podgsom_2004@mail.ru K.A. Vorotilov - Dr.Sc. (Eng.), Professor, Director, REC «Technological Center», Moscow Technological University. Е-mail: vorotilov@mirea.ru А.S. Sigov - Dr.Sc. (Phys.-Math.), Professor, Academician RAS, Moscow Technological University. Е-mail: sigov@mirea.ru Р.Р. Lavrov - Post-Graduate Student, Nanoelectronics Department, Moscow Technological University. Е-mail: podgsom_2004@mail.ru

The paper presents the method of determining with higher accuracy remnant polarization and the coercive field of nanoscale ferroelectric structures by measuring the switching current of the ferroelectric polarization at two frequencies. Capacitor structures with dense and porous PZT films with thicknesses from 200 to 1200 nm were used to perform experiments. The calculation formulas are given to determine both the remnant polarization without contribution the leakage current and for determining of the relaxation losses for both triangular and sinusoidal voltage waveform. The application for calculations of any combination of the measurement results of switching currents on the frequencies 100, 200 and 300 Hz gives actually the same values.

 

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