V.A. Kufterin1, K.S. Polienko2, A.T. Tungushpaev3

1−3 JSC "Precision Systems and Instruments" (Moscow, Russia)

Micro-optical-electromechanical systems or deformable mirrors (DZ) are currently the key elements of adaptive systems of the new generation. These systems provide high performance and precision output characteristics. The creation of domestic samples of adaptive MOEMS devices is an urgent task today. In the course of the work described in this article, the structure of the MOEMS sensor was selected, a mathematical model was created in the ANSYS program, during the analysis of which the mass-dimensional parameters were calculated, and the optical and electrical parameters of the MOEMS device were calculated. These systems are widely used in space-time light modulators, machine vision systems, laser projection displays and other information systems.

Kufterin V.A., Polienko K.S., Tungushpaev A.T. Development of micro-optics-electromechanical systems technology. Information-measuring and Control Systems. 2023. V. 21. № 3. P. 50−57. DOI: https://doi.org/10.18127/j20700814-202303-08 (in Russian)

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