А.R. Bestugin – Dr.Sc. (Eng.), Professor, Director of Institute of Radio Engineering, Electronics and Communications,
Saint Petersburg State University of Aerospace Instrumentation
L.V. Belova – Post-graduate Student, , Saint Petersburg State University of Aerospace Instrumentation; Design Engineer, JSC «VNIIRA» (St. Petersburg)
E-mail: belova-lilia@rambler.ru

The main sources of energy loss are considered in the article: air damping, acoustic anchor losses, thermoelastic damping and internal losses. For each source of energy loss, the example of a beam resonator is based on several parameters, and methods for determining numerical values are also given. Recommendations are given on the selection of the resonator parameters in the design of electronic devices.

1. Bestugin A.R., Belova L.V. E'kvivalentnaya e'lektromekhanicheskaya model' diskovogo rezonatora // Uspekhi sovremennoj radioe'lektronniki. 2016. № 11. S. 253–259.
2. Emel'yanov A.V., Emel'yanov I.A., Zenkina I.A. Uravnenie Rejnol'dsa dlya tonkogo sloya vyazkoj sredy // Inovatsionnaya nauka. 2016. № 11–3.
3. Jay Brotz Damping in CMOS-MEMS Restorans. Carnegie Mellon University. 2004.
4. Shakhnovich I. ME'MS–giroskopy – edinstvo vybora // E'lektronnika. Nauka. Tekhnologiya. Biznes. 2007. № 1. S. 76–95.
5. Vtoroshin S.E., Nesterenko T.G. Modal'nyj analiz deformatsii mikrostruktur rezonanskogo mikroe'lektronnogo aksele-rometra //Fundamental'nye issledovaniya 2015. № 2. S. 2553–2557.
6. Materialy v priborostroenii i avtomatike: Spravochnik / Pod red. Yu.M. Pyatina. M.: Mashinostroenie. 1982.
7. Mahesh Angira, Sundaram G.M., Kamaljit Rangra A Novel Approach for Low Insertion Loss, Multi-band, Capacitive Shunt RF–MEMS Switch // Wireless
   Personal Communications. 2015. V. 83. № 3. P. 2289–2301.