А.R. Bestugin - Dr.Sc. (Eng.), Professor, Director, Institute of Radio Engineering, Electronics and Communications, FGAOU VO Saint Petersburg State University of Aerospace Instrumentation О.М. Filonov - Ph.D. (Eng.), Associate Professor, FGAOU VO Saint Petersburg State University of Aerospace Instrumentation I.А. Kirshina - Ph.D. (Econ.), Associate Professor, FGAOU VO Saint Petersburg State University of Aerospace Instrumentation N.А. Ovchinnikova - Ph.D. (Eng.), Associate Professor, FGAOU VO Saint Petersburg State University of Aerospace Instrumentation P.А. Okin - Post-graduate Student, FGAOU VO Saint Petersburg State University of Aerospace Instrumentation Е.V. Andreeva - Post-graduate Student, FGAOU VO Saint Petersburg State University of Aerospace Instrumentation E-mail: fresguap@mail.ru

In production of micromechanical systems the steady tendency to increase of metrological indicators of these products to the level of precision systems of traditional execution is traced. One of solutions of this task is operation of parametrical correction (adjustment) on essentially other technical basis. The algorithm of carrying out operation of parametrical correction (a static equilibration) of micromirrors for systems of optical communication. Results of the comparative analysis of two technologies of extraction on the basis of laser or ion-beam dispersion are given.

 

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