A.R. Bestugin - Dr.Sc. (Eng.), Professor, Deccan, Departament «Radio Engineering, Electronics and Communication», FSAEI HPE «Saint-Petersburg State University of Aerospace Instrumentation» O.M. Filonov - Ph.D. (Eng.), Associate Professor, Departament «Design and Technology of Electronic and Laser Tools», FSAEI HPE «Saint-Petersburg State University of Aerospace Instrumentation» I.A. Kirshina - Ph.D. (Econ.), Associate Professor, Departament «Design and Technology of Electronic and Laser Tools», FSAEI HPE «Saint-Petersburg State University of Aerospace Instrumentation» P.A. Okin - Post-graduate Student, FSAEI HPE «Saint-Petersburg State University of Aerospace Instrumentation» E.V. Andreeva - Magister, FSAEI HPE «Saint-Petersburg State University of Aerospace Instrumentation». E-mail: zlata@aanet.ru

In production of micromechanical systems the steady tendency to increase of metrological indicators of these products to the level of precision systems of traditional execution is traced. One of solutions of this task is operation of parametrical correction (adjustment) on essentially other technical basis. The algorithm of carrying out operation of parametrical correction (a static equilibration) of mi- cromirrors for systems of optical communication including three stages is offered: 1. Definition area of localization unbalanced weight in volume of a micromirror and its reduction to area on a surface where extrac- tion operation is performed. 2. Determination of size of the extracted weight. 3. Choice of a method and modes of carrying out operation of extraction. The considered algorithm significantly expands technological capabilities of production of microelectromechanical devices first of all of aktyuator, and also microgyroscopes and microaccelerometers. It is necessary to refer technological availability, lack of need for ac- quisition of the unique processing and measuring equipment, possibility of carrying out operation in completely automated cycle to advantages of algorithm.

 

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