A.R. Bestugin - Dr.Sc. (Eng.), Associate Professor, Director, Institute of Radio Engineering, Electronics and Communication. E-mail: zlata@aanet.ru
O.M. Filonov - Ph.D. (Eng.), Associate Professor, Department «Micro and Nanotechnologies of Space Instrument Making», FGAOU VPO St. Petersburg State University of Space Instrument Making. E-mail: zlata@aanet.ru
I.A. Kirshina - Ph.D. (Econ.), Associate Professor, Department «Micro and Nanotechnologies of Space Instrument Making», FGAOU VPO St. Petersburg State University of space instrument making. E-mail: zlata@aanet.ru

Results of researches of micro and nanoelectromechanical resonators of GHz range are given. The problems connected with development of theoretical models of these devices, dimensional factors considering influence are analysed. Problems of a determinirovaniye of fluctuations of resonators for the subnanometer range of amplitudes are considered. The assessment of applicability of existing technical means as secondary measuring converters in MEM and NEM resonators is carried out.

1. Filonov O.M., Kirshina I.A., Okin P.A. Osobennosti proektirovanii chuvstvitel'nyh jelementov MJeMS s rezonansnymi izmeritel'nymi preobrazovateljami // Fundamental'nye i prikladnye issledovanija v sovremennom mire: IV Mezhdunar. nauch.-prakt. konf. Dek. 2013. Sankt-Peterburg. 2013. S. 37-39.
2. Bestugin А., Filonov О.M., Kirshina I.A., Okin P.A. Operated change of mechanical properties of silicon at its alloying // European science review. May-June. № 5 6/2014. P. 43-46.
3. Li X., Ono T. Study on Ultra - thin NEMS cantilever - high yield fabrication and size effect on Young-s modulus of sili-con / Micro Electro Mechanical System. The Fifteenth IEEE International Conference. 2002.