Optimization of magnetic concentrators of magnetically controlled MEMS switches

С.М. Карабанов; Д.В. Суворов; Г.П. Гололобов; Д.Ю. Тарабрин; Е.В. Сливкин; Е.М. Григорьев

doi:10.18127/j00338486-202011(21)-10

Optimization of magnetic concentrators of magnetically controlled MEMS switches

С.М. Карабанов¹, Д.В. Суворов², Г.П. Гололобов³, Д.Ю. Тарабрин⁴, Е.В. Сливкин⁵, Е.М. Григорьев⁶

research article UDC 621.389 Pages: 82-88 doi.org/10.18127/j00338486-202011(21)-10

¹ д.т.н., профессор кафедры. «Электронная техника», Лауреат премии Правительства РФ с области науки и техники SPIN-код: не представлен
^2,3,4,5 к.т.н., доцент кафедры «Промышленная электроника» SPIN-код: не представлен
⁶ директор Касимовского приборного завода, Лауреат конкурса им. Петра Великого «Лучший менеджер России за 2000 год», Лауреат премии Рязанской области по науке и технике имени академика В.Ф. Уткина SPIN-код: не представлен

Keywords: MEMS switch magnetic sensitivity magnetic concentrator

Abstract

This article presents the results of a study of the influence of various parameters of the geometry of magnetic concentrators on the magnetic sensitivity of magnetically controlled MEMS switches. It is shown that the magnetic sensitivity increases with an increase in the width of the magnetic concentrator and is practically independent of its length. It has been established that the dependence of the magnetic sensitivity on the length of the overlap of the beam-concentrator has a minimum corresponding to approximately 2-3 lengths of the contact gap. Recommendations for increasing the sensitivity of magnetically controlled switches are presented.

Received: 14.09.2020

How to cite

Карабанов С.М., Суворов Д.В., Гололобов Г.П., Тарабрин Д.Ю., Сливкин Е.В., Григорьев Е.М. Оптимизация магнитных концентраторов магнитоуправляемых MEMS-коммутаторов // Радиотехника. 2020. № 11. С. 82–88. DOI: https://doi.org/10.18127/j00338486-202011(21)-10

References

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Niekiel Florian & Su Jingxiang & Bodduluri Mani Teja & Lisec T. & Blohm Lars & Pieper Isa & Wagner Bernhard & Lofink Fabian. Highly Sensitive MEMS Magnetic Field Sensors with Integrated Powder-based Permanent Magnets. Sensors and Actuators A: Physical. 2019. 297. 10.1016/j.sna.2019.111560.
Coutier C. Chiesi L., Garnier A., Fourrier J.C., Lapiere C., Trouillon M., Grappe B., Vincent M., Samperio A., Borel S., Dieppedale C., Lorent E., Sibuet H. A new magnetically actuated switch for precise position detection. Solid-State Sensors, Actuators and Microsystems Conference. TRANSDUCERS 2009. International. 2009. P. 861864.
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[1] Schiavone Giuseppe & Desmulliez M.P.Y. & Walton Anthony. Integrated Magnetic MEMS Relays: Status of the Technology. Micromachines. 2014. 5. P. 622653. 10.3390/mi5030622.

[2] Niekiel Florian & Su Jingxiang & Bodduluri Mani Teja & Lisec T. & Blohm Lars & Pieper Isa & Wagner Bernhard & Lofink Fabian. Highly Sensitive MEMS Magnetic Field Sensors with Integrated Powder-based Permanent Magnets. Sensors and Actuators A: Physical. 2019. 297. 10.1016/j.sna.2019.111560.

[3] Coutier C. Chiesi L., Garnier A., Fourrier J.C., Lapiere C., Trouillon M., Grappe B., Vincent M., Samperio A., Borel S., Dieppedale C., Lorent E., Sibuet H. A new magnetically actuated switch for precise position detection. Solid-State Sensors, Actuators and Microsystems Conference. TRANSDUCERS 2009. International. 2009. P. 861864.

[4] US6633158 B1 (Micro magnetic proximity sensor apparatus and sensing method). 14.10.2003.

[5] US 8,327,527 B2 (INTEGRATED REED SWITCH). 11.12.2012.

[6] Min Tang, Yong Hean Lee, Kumar R., Shankar R., Le Neel O. A MEMS micro-reed switch designed for portable applications. In Magnetism, Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS). 16th International. 2011. P. 28472850.

[7] Min Tang, Yong Hean Lee, Kumar R., Shankar R., Le Néel O., Noviello G. A MEMS Microreed Switch With One Reed Embedded in the Silicon Substrate. Microelectromechanical Systems. 2011. V. 20. Is. 6. P. 13361344.

[8] Karabanov S.M., Gololobov G.P., Tarabrin D.Y., Slivkin E.V. Increase of Magnetic Sensitivity of Magnetically Controlled MEMS Switches. MRS Advances. 2016. V. 1. № 34. Р. 23932399. DOI:10.1557/adv.2016.395.

[9] Jasevich V.I. Issledovanie osobennostej primenenija gerkonov bez kontaktnogo pokrytija. Vestnik RGRTU. 2009. № 3 (vyp. 29)(In Russian).

[10] Korotchenko V.A., Solov'ev V.I., Putilina Zh.V. Jelektromagnitnye, mehanicheskie i jelektronnye processy pri vykljuchenii vysokovol'tnyh gerkonov. Vestnik RGRTU. 2015. № 53(In Russian).

[11] Korotchenko V.A., Solov'ev V.I., Solotenkova Zh.V. Dinamika razmykanija magnitoupravljaemyh kontaktov pri razryve jelektricheskogo toka. Vestnik RGRTU. 2011. № 36(In Russian).