Miniaturization Limit for Mechanical Nanomanipulators
- 1 аспирант, НИТУ «МИСиС»
Abstract
Samples of micro- and nano-actuators with shape memory effect (SME) with the thicknesses of from 800 to 70 nm were fabricated. It is shown that the ability to giant thermo-induced deformations is conserved at the thickness of SME layer of down to 140 nm. The physical restrictions on minimal size of mechanical nanomanipulators are discussed.
How to cite
Захаров Д.И. Предел миниатюризации механических наноманипуляторов // Нанотехнологии: разработка, применение - XXI век. 2012. № 2. С. 45–46.
References
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