Development of micro-optics-electromechanical systems technology

V.A. Kufterin; K.S. Polienko; A.T. Tungushpaev

doi:10.18127/j20700814-202303-08

Development of micro-optics-electromechanical systems technology

V.A. Kufterin¹, K.S. Polienko², A.T. Tungushpaev³

research article UDC 621.396 Pages: 50-57 doi.org/10.18127/j20700814-202303-08

Keywords: Micro-optical-electromechanical systems wavefront sensor deformable mirrors Fabry-Perot interferometer optical dis-placement sensor

Abstract

Micro-optical-electromechanical systems or deformable mirrors (DZ) are currently the key elements of adaptive systems of the new generation. These systems provide high performance and precision output characteristics. The creation of domestic samples of adaptive MOEMS devices is an urgent task today. In the course of the work described in this article, the structure of the MOEMS sensor was selected, a mathematical model was created in the ANSYS program, during the analysis of which the mass-dimensional parameters were calculated, and the optical and electrical parameters of the MOEMS device were calculated. These systems are widely used in space-time light modulators, machine vision systems, laser projection displays and other information systems.

Received: 11.01.2023
Approved after review: 18.01.2023
Accepted: 20.04.2023

How to cite

Куфтерин В.А., Полиенко К.С., Тунгушпаев А.Т. Технология создания микро-оптико-электромеханических систем // Информационно-измерительные и управляющие системы. 2023. Т. 21. № 3. С. 50−57. DOI: https://doi.org/10.18127/j20700814-202303-08

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[1] Manum H., Schmid M. Monitoring in a harsh environment (Ormen Lange gas field). Comput. Control. Eng. 2007. № 18. Р. 22–27 [Google Scholar] [CrossRef].

[2] Вассенааровские экономические санкции URL: http://wassernaar.org (дата обращения: 12.04.2022)

[3] Torres D., Wang T., Zhang J., Zhang X., Dooley S., Tan X., Xie H., Seplveda N. VO2-based MEMS mirrors. J. Microelectromech. Syst. 2016. Р. 780-787 [CrossRef].

[4] Korposh S., James S., Lee S.-W., Tatam R. Tapered Optical Fibre Sensors: Current Trends and Future Perspectives. Sensors. 2019.
№ 19. Р. 2294 [Google Scholar] [CrossRef].

[5] Zamkotsian F., Lanzoni P., Barette R., Helmbreecht M., Marchis F., Teichman A. Operation of a MOEMS deformable mirror in cryo: challenges and results. Micromachines. 2017. № 8. Р. 233 [CrossRef].

[6] Lobontiu N., Garcia E. Mechanics of Microelectromechanical Systems. 1st ed. Springer: New York, NY, USA. 2005. Р. 131–182 [Google Scholar].

[7] Wang Y., Ma X. Optimal sensor selection for wind turbine condition monitoring using multivariate principal component analysis approach. In Proceedings of the 18th International Conference on Automation and Computing (ICAC). Leicestershire, UK. 7 September 2012 [Google Scholar].

[8] Li H., Duan X., Li G., Oldham K.R., Wang T.D. An electroelastic MEMS Translational scanner with large out-of-plane stroke for remote axial-scanning in multi-photon microscopy. Micromachines. 2017. № 8. Р. 159 [CrossRef].