S.А. Nalimov

С.А. Налимов

5 articles 2017–2021

2021

Piezoelectric films of AlN grown by reactive high-frequency magnetron sputtering Nanotechnology : the development , application - XXI Century, No. 3, 2021 pp. 28-37
Structure and emission properties of structures based on carbon walls and aluminum nitride Science Intensive Technologies, No. 1, 2021 pp. 56-64

2020

Obtaining nanocomposites based on opal matrix and silicon-containing substances Radioengineering, No. 4, 2020 pp. 59-68
Structure and emission properties of structures based on carbon walls and aluminum nitride Electromagnetic Waves and Electronic Systems, No. 3, 2020 pp. 20-28

2017

Preparation by RF-magnetron sputtering of aluminum nitride films for the devices on a surface acoustic wave Science Intensive Technologies, No. 4, 2017 pp. 46-53