S.S. Antsyferov1, K.N. Fazilova2, K.E. Rusanov3

1–3 MIREA – Russian Technological University (Moscow, Russia)
 

Probe nanometry systems are widely used to observe and measure the parameters of nanostructured objects. Because of this, they need appropriate metrological support and, above all, methods and technical systems for controlling the calibration of reference measures. It should be noted that the quality of the functioning of the calibration control systems of reference measures must be constantly monitored, which in turn guarantees the achievement of the necessary accuracy indicators.

The purpose of the work is to develop a methodology for quality control of the functioning of the calibration control system for reference measures of nanometry.

This system is a set of methods and tools designed for calibration of reference measures of probe nanometry systems. Let's imagine this set as a set of interrelated structural elements (SE). We will assume that each SE of this system contains a local knowledge system, means of accumulating or correcting it during operation, means of exchange with other elements and its own measure of efficiency in solving a common problem. We approximate the specified set of SE with a cognitive model and determine the functional purpose and performance indicators of each SE.

Quality control of functioning is associated with the performance of such operations as the establishment of a range of acceptable values of the probabilities of the effectiveness of the functioning of the structural elements of the system, the construction of a phase diagram of the functioning of the system and the definition of acceptable limits of quality indicators.

The quality control of the system functioning is carried out by the position of points in the phase space relative to the boundary values of quality indicators. In case of "exit" of one or another point beyond the limits of the established boundary values, appropriate decisions are made on the correction of certain parameters of technological processes.

As a result of the use of the quality control methodology for the functioning of the system, the calibration process has acquired a multi-step character, which made it possible to improve the accuracy of height measurement by sequentially correcting the parameters of technological processes.

The use of the quality control methodology for the functioning of the control system for the calibration of reference measures has made it possible to achieve the accuracy of measuring the height of the reference measure comparable to the accuracy of the reference interferometry method.

Antsyferov S.S., Fazilova K.N., Rusanov K.E. Methodology of quality control system functioning for nanometry reference measures calibration. Science Intensive Technologies. 2022. V. 23. № 1. P. 29−34. DOI: https://doi.org/10.18127/j19998465-202201-04 (in Russian)

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