M.V. Stepanov - Research Scientist, Moscow State University of Information Technologies, Radio Engineering and Electronics (MIREA); Senior Lecturer, Moscow State University of Mechanical Engineering (MAMI). E-mail: nanocompiler000@yandex.ru A.A. Evdokimov - Dr. Sc. (Chem.), Professor, Head of Department of Chemistry, Moscow State University of Information Technologies, Radio Engineering and Electronics (MIREA). E-mail: evdokimov@mirea.ru Yu.B. Zubarev - Dr. Sc. (Eng.), Professor, Corresponding Member of RAS, Director of Radio Research and Development Institute (Moscow).

Crucial an integral part of the open multiclusters nanotechnology installing flexible manufacturing system is a module «Supercomputer». This allows you to organize a closed line of nanotechnology - design center + nanofactory. Module «Supercomputer» allows to simulate and to design microstructure, nano, nanocircuits, functional nanosystems, MEMS, NEMS that can be made on multiclusters nanotechnol-ogy installing. Open multiclusters nanotechnology installing flexible manufacturing system implements PLM-technology for the develop-ment and manufacture of experimental samples of integrated nanosystems on «digital factory».

 

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