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Journal Science Intensive Technologies №3 for 2013 г.
Article in number:
The possibility of obtaining high-purity tetraalkylammonium hydroxides with a lower alkyl substituents
Authors:
N.V. Kotova, A.N. Konovalov, E.E. Greenberg, E.P. Krysin, D.V. Kotov, V.A. Shatokhina
Abstract:
Tetraalkylammonium hydroxides (TAAH) of general formula [R4N]+OH- and its salts are widely used in various branches of chemistry and technology. The present work describes the main methods of obtaining which are available in the literature, viz. chromatographic, electrochemical, ion exchange methods. A brief description of the works about the preparation of tetraalkylammonium hydroxides on each of these methods are reduced. Both the basic properties of the compounds of this class and their applicability are described. This review paper is designed to simplify the orientation in data for specialists who begin their work with this class of compounds. In the second part of this paper the optimized method of obtaining TAAH on ion exchange resin with further post-treatment stage is provided. The proposed method allows to obtain the desired product which is suitable for use in microlithography processes. The modern analytical equipment for the analysis of the products was used, and this fact allowed proving the purity of the products obtained by the proposed method.
Pages: 24-29
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