350 rub
Journal Science Intensive Technologies №5 for 2011 г.
Article in number:
Y. DUSCH IEMN, UMR CNRS 8520, PRES Lille Nord de France, ECLille, 59651 Villeneuve d-Ascq, France. E-mail: yannick.dusch@centraliens-lille.org N. TIERCELIN V.A. Kotelnikov Institute of Radioengineering and Electronics, 125009 Moscow, Russia A. KLIMOV V.A. Kotelnikov Institute of Radioengineering and Electronics, 125009 Moscow, Russia V. RUDENKO IEMN, UMR CNRS 8520, PRES Lille Nord de France, ECLille, 59651 Villeneuve d-Ascq, France. E-mail: yannick.dusch@centraliens-lille.org Y. IGNATOV V.A. Kotelnikov Institute of Radioengineering and Electronics, 125009 Moscow, Russia S. HAGE-ALI IEMN, UMR CNRS 8520, PRES Lille Nord de France, ECLille, 59651 Villeneuve d-Ascq, France. E-mail: yannick.dusch@centraliens-lille.org P. PERNOD IEMN, UMR CNRS 8520, PRES Lille Nord de France, ECLille, 59651 Villeneuve d-Ascq, France. E-mail: yannick.dusch@centraliens-lille.org V. PREOBRAZHENSKY IEMN, UMR CNRS 8520, PRES Lille Nord de France, ECLille, 59651 Villeneuve d-Ascq, France. E-mail: yannick.dusch@centraliens-lille.org; Wave Research Center, GPI RAS, 38 Vavilov str., Moscow, 119991, Russia
In various micro and nanosystems applications comprising magnetic films, the polarizing field still needs to be integrated. We hereby present a solution for self biasing of magnetic films using micropatterned permanent magnets. Micromagnetic simulations were used as a designing and optimization tool to create a biasing structure. Samples were elaborated with varying geometric parameters using classical silicon microfabrication techniques. Nanostructured TbCo/FeCo magnetostrictive thin films were sputtered over coercive FePt filled trenches etched in silicon. Magnetic and magnetoelastic characterizations confirmed numerical simulations. In particular, non-linear actuation of a self-biased magnetostrictive cantilever has been obtained at zero external polarizing field.
Pages: 35-40
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