B.D. Zaitsev – Dr.Sc.(Phys.-Math.), Professor, Head of Laboratory of Physical Acoustics, 

Saratov branch of Kotel'nikov IRE of RAS

E-mail: zai-boris@yandex.ru

A.P. Semenov – Ph.D.(Phys.-Math.), Senior Research Scientist, Laboratory of Physical Acoustics, 

Saratov branch of Kotel'nikov IRE of RAS

E-mail: alex-sheih@yandex.ru

A.A. Teplykh – Ph.D.(Phys.-Math.), Senior Research Scientist, Laboratory of Physical Acoustics, 

Saratov branch of Kotel'nikov IRE of RAS

E-mail: teplykhaa@mail.ru

I.A. Borodina – Ph.D.(Phys.-Math.), Senior Research Scientist, Laboratory of Physical Acoustics, 

Saratov branch of Kotel'nikov IRE of RAS

E-mail: borodinaia @yandex.ru

On the basis of the theoretical and experimental investigation of the effect of the thin conductive metal film on the characteristics of the piezoelectric resonator with the lateral electric field, the possibility of the development of a microdisplacements controller in the range 0−0.3 mm was shown. To carry out the experiment two resonators on the basis of the piezoceramics PZT-19 with the thicknesses of 3.56 and 4.46 mm and the resonant frequencies of 96 kHz and 260 kHz were used. It was experimentally found, that in the both cases, the frequency of the parallel resonance and maximum value of the real part of the electrical impedance increases and reaches saturation with the increase the air-gap between the free side of the piezoelectric resonator and thin aluminium film. Moreover. it was shown that that relative changes of these quantities at the change of the gap width from 0 to 300 μm increase with decreasing the resonator thickness. At that, the frequency of the series resonance practically does not change. It was also found that near the frequency of 96 kHz the sensitivity of the resonator to the presence of the conducting film is significantly higher. The experimental results are in a good agreement with the theoretical data.

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