V.I. Anisimkin – Dr.Sc. (Phys.-Math), Principal Research Scientist,
Kotel’nikov Institute of Radioengineering ang Electronics of RAS (Moscow)
M.A. Zemlyanitsin – Leading Engineer,
Kotel’nikov Institute of Radioengineering ang Electronics of RAS (Moscow)
I.A. Nedospasov – Junior Research Scientist,
Kotel’nikov Institute of Radioengineering ang Electronics of RAS (Moscow)
Problem formulating. For optimizing the waves and substrates using in various acoustic sensors it is necessary to know the sensitivity of the wave velocities towards variations of the substrate parameters and geometry.
Goal. To clarify qualitative and quantitative dependence of the Lamb and SH-plate waves on the variation of the density ρ, elastic modulii Сij, and normalized thickness of the crystalline plate H/λ.
Result. For both types of the plate waves there are same sets of elastic modulii affecting and not affecting the waves velocities, but the value and sign of the wave variations depend on the type of the wave, the mode order, the plate thickness H, and the wavelength λ.
Practical meaning. When developing one or the other type of the sensor based on acoustic plate waves it is necessary to take into account that even for one and the same material of the substrate the sensor response may be varied depending on the type of the wave, the mode order, the plate thickness, and the wavelength.
- Adler E.L., Slaboszewics J.K., Farnel G.W.L., Jen C.K. PC Software for SAW Propagation in Anisotropic Multi-Layers. IEEE Trans. 1990. V. UFFC- 37. № 3. P. 215.
- Slobodnik A.J. (Jr.) Conway E.D., Delmonico R.T. Microwave Acoustic Handbook. 1973. AFCRL-TR-73-0597.