350 rub
Journal Nonlinear World №3 for 2009 г.
Article in number:
Formation of Thin Films with Nano-Scale Composition Periodicity in Pulsed Low-Temperature Plasma
Keywords: nanofilms plasma luminescence
Authors:
A.A. Serdobintsev
Abstract:
The possibility of formation of nano-scale layers with different composition in thin films, deposited by the magnetron sputtering in reactive low-temperature plasma, is showed. Composition control is achieved by using a pulse operation mode with changeable on-off time pulses ratio. Photoluminescence of these films was investigated; possibility of luminescent properties control was established. Formation of nonlinear optical media, in particular luminescent lasers on the basis of these films is possible
Pages: 166
References
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