R.N. Nenashev - Student, Faculty of Chemistry, M.V. Lomonosov Moscow State University. E-mail: roman.nenashev@gmail.ru
D.S. Seregin - Ph.D. (Eng.), Head of Department «Technological Center», MIREA. E-mail: d_seregin@mirea.ru
V.P. Zlomanov - Dr.Sc. (Chem.), Professor, M.V. Lomonosov Moscow State University. E-mail: zlomanov@inorg.chem.msu.ru

Nanostructured vanadium dioxide films was synthesized by sol-gel method with thickness of 40-200 nm. Vanadyl acetylacetonate was used as the precursor from which was prepared a methanol sol and deposited on a silicon substrate by centrifugation. It is considered that increasing number of layers occurs thickening of film, changing the shape and orientation of the crystal grains and they size distribution. Influence of the structure and thickness of films on the parameters of phase transition was investigated. It was determined that height of hysteresis loop depends on the film thickness, that half-width depends on the size of the crystallites and symmetry depends on the uniformity of the distribution of the crystallite size.