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Prospective Plasma Sources for Plasma and Ion-Beam Nanotechnologies

Keywords:

Alexandrov A.F., Vavilin K.V., Kralkina E.A., Pavlov V.B., Rukhadze A.A.


The paper represents the results of many years work of the authors in the field of plasma sources development and their approval in the surface modification technologies. The plasma sources families operating at high vacuum conditions, low and atmospheric pressure are discussed. The results of surface modification technologies realised with the help of original plasma sources are compared
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