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Controlled Formation Process and Structure of thin Films. Ion-Assisted Processes

Keywords:

M.B. Guseva, V.G. Babaev, Khvostov V.V., Savchenko N.F.


The quantitative investigations of thin films formation by low energy ion assisted process were carried out. Influence of ion irradiation parameters on the thin films structure and their growth was detected. Physical foundations of thin films ion beam technology with predefined structure and properties were created.
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