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Formation of Thin Films with Nano-Scale Composition Periodicity in Pulsed Low-Temperature Plasma

Keywords:

A.A. Serdobintsev


The possibility of formation of nano-scale layers with different composition in thin films, deposited by the magnetron sputtering in reactive low-temperature plasma, is showed. Composition control is achieved by using a pulse operation mode with changeable on-off time pulses ratio. Photoluminescence of these films was investigated; possibility of luminescent properties control was established. Formation of nonlinear optical media, in particular luminescent lasers on the basis of these films is possible
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