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Trends of development of nanostructural sensitive elements of uncooled IR-microbolometers

DOI 10.18127/j22250999-201804-07

Keywords:

N.A. Kulchitsky ‒ Dr.Sc. (Eng.), Professor, MIREA - Russian Technological University; Chief Specialist, Orion Scientific and Production Association (Moscow)
E-mail: n.kulchitsky@gmail.com
A.V. Naumov ‒ Senior Research Scientist, Astrohn Experimental Design Bureau (Lytkarino, Moscow )
E-mail: naumov_arkadii@mail.ru
V.V. Startsev ‒ Leading Research Scientist, Astrohn Experimental Design Bureau (Lytkarino, Moscow)
E-mail: v@aiz.com


The analysis of a current state and the prospect of development of the IR-systems’ market is carried out. The market of uncooled mi-crobolometers as most important element of IR-systems is carried out. The nanostructure of a sensitive element of the bolometer contains layers from silicon nitride, vanadium oxide. Thickness of a layer of silicon nitride does not exceed 210 nm, thickness of a layer of oxide of vanadium does not exceed 170 nm, thickness of the reflector which is manufactured of gold or aluminum does not exceed 100 nm. It is noted that by 2022 growth of the market of IR-cameras to level over 1,7 mln pcs/year over 4 billion US dollars/year is expected.

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June 24, 2020
May 29, 2020

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