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Properties of the acoustic plate waves in layered structures based on ZnO film/SiO2 plate and AlN film/ SiO2 plate


A.S. Kuznetsova  Ph.D. (Phys.-Math.), Research Scientist, Kotelnikov’ IRE RAS (Moscow)
V.I. Anisimkin – Dr.Sc. (Phys.-Math.), Chief Research Scientist, Kotelnikov’ IRE RAS (Moscow)
V.A. Osipenko  Ph.D. (Phys.-Math.), Senior Research Scientist, Elpa Corporation (Moscow)

The influence of ZnO and AlN films deposition on acoustic plate wave propagation in quartz plates are studied experimentally. The changes in phase velocities and surface amplitudes due to the presence of the films are measured for the Lamb and SH counterparts.  Quantitative and qualitative difference of the films effects is demonstrated due to the difference in acoustic and piezoelectric properties of the films.

  1. Anisimkin V.I., Voronova N.V. // IEEE Transactions. 2011. V. UFFC-58. № 3. P. 578584.
  2. Anisimkin V.I., Verona Je., Kuznecova A.S., Osipenko V.A. // Nelinejnyj mir. 2017. T. 15. № 5. C. 1821.
  3. Akusticheskie kristally / Pod red. M.P. Shaskol'skoj. M: Nauka. 1982. 632 s.
  4. Anisimkin V.I., Voronova N.V., Kuznecova I.E., Pjatajkin I.I. // Izvesti RAN. Ser. Fizicheskaja. 2015. T. 79. № 10. S. 14371441.

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