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The effect of heat treatment on the structure and characteristics of field emission cathodes on a layered structures of titanium nitride and carbon nanowalls


A.F. Belyanin - Dr.Sc. (Eng.), Chief Research Scientist, CRTI «Technomash» (Moscow) E-mail: V.V. Borisov - Leading Programmer, Skobeltsyn Institute of Nuclear Physics of Lomonosov Moscow State University N.I. Sushentsov - Ph.D. (Eng.), Head of Department, Volga State University of Technology (Yoshkar-Ola) S.A. Stepanov - Assistant, Volga State University of Technology (Yoshkar-Ola) D.E. Shashin - Post-graduate Student, Volga State University of Technology (Yoshkar-Ola)

The layered structures were formed and investigated on the Si substrates from nanostructured films of TiN, as well as the carbon na-nowalls (CNW), which are promising for the creation of field-emission cathodes. CNW formed from a gas phase hydrogen and methane activated by a DC glow discharge. Films of TiN formed by arc discharge and magnetron sputtering. The composition and structure of the CNW and films of TiN studied with electron microscopy and Raman spectroscopy. It is shown that represent the CNW porous material composed of a curved plate (scaly) forms carbon material crystallites 3–10 nm thick. The emission properties of layered structures Si/TiN/CNW, Si/C/TiN, and the dependence of these properties on thickness and structure of the of TiN deposited, were investigated. The effect of heat treatment and laser irradiation in air and in atmosphear of H2 and N2 to the structure of the CNW and layered structures CNW/TiN and the current-voltage characteristics of field-emission cathodes made by the CNW.



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