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Influence of potential of displacement at the processing microwave plasma of various gases on morphological and field emission properties of plates Si (100) p-type

Keywords:

V.Ya. Shanygin - Ph.D. (Eng.), Senior Engineer, Kotel\'nikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences (Saratov Branch) R.K. Yafarov – Dr.Sc. (Eng.), Нead of Laboratory, Kotel\'nikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences (Saratov Branch) S.Yu. Suzdaltsev – Ph.D. (Eng.), Senior Research Scientist, Kotel\'nikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences (Saratov Branch) D.V. Nefedov – Ph.D. (Eng.), Research Scientist, Kotel\'nikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences (Saratov Branch)


An ifluence of the potential of displacement on the microwave plasma processing in plasma of freon-14, argon, hydrogen and oxygen on morphological and field emission properties of plates Si (100) p-type conductivity is demonstrated.
References:

 

  1. JAfarov R.K., SHanygin V.JA. Osobennosti strukturirovanija poverkhnosti kristallov kremnija (100) pri SVCH plazmennojj obrabotke v razlichnykh gazovykh sredakh // Pisma v ZHTF. 2013. T. 39. Vyp. 9. S. 1-8.

 

June 24, 2020
May 29, 2020

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