Radiotekhnika
Publishing house Radiotekhnika

"Publishing house Radiotekhnika":
scientific and technical literature.
Books and journals of publishing houses: IPRZHR, RS-PRESS, SCIENCE-PRESS


Тел.: +7 (495) 625-9241

 

Making of planar-butt field emission structures on silicon and investigation their characteristics

Keywords:

D.V. Nefedov – Ph.D. (Eng.), Researcher, Saratov Branch of the Kotel’nikov Institute of Radio Engineering and Electronics Russian Academy of Science E-mail: nefedov_dv@rambler.ru S.Y. Suzdaltsev – Ph.D. (Eng.), Senior Research Scientist, Saratov Branch of the Kotel’nikov Institute of Radio Engineering and Electronics Russian Academy of Science V.Y. Shanygin - Senior Engineer, Saratov Branch of the Kotel’nikov Institute of Radio Engineering and Electronics Russian Academy of Science R.K. Yafarov – Dr.Sc. (Eng.), Professor, Head of the Laboratory, Saratov Branch of the Kotel’nikov Institute of Radio Engineering and Electronics Russian Academy of Science


The planar-butt structures on silicon are fabricated. The field emission characteristics are investigated. The considerable influence to maximum current density depend on forming of emission windows are established. Investigated structures has perspective of applying for vacuum electronics devices are integrated to semiconductor structures.
References:
  1. Suzdalcev S.JU., Nefedov D.V., Ogurcov K.N., Burov A.M. // PZHTF. 2011. T. 37. Vyp. 18. S. 37-43.
June 24, 2020
May 29, 2020

© Издательство «РАДИОТЕХНИКА», 2004-2017            Тел.: (495) 625-9241                   Designed by [SWAP]Studio