Radiotekhnika
Publishing house Radiotekhnika

"Publishing house Radiotekhnika":
scientific and technical literature.
Books and journals of publishing houses: IPRZHR, RS-PRESS, SCIENCE-PRESS


Тел.: +7 (495) 625-9241

 

Growth feature of ionic nitrogen doped A-C:NX films obtain by pulse cathode arc discharge

Keywords:

D.G. Piliptsov - Ph.D. (Eng.), Senior Research Scientist, International Chinese-Belarusian Scientific Laboratory on Vacuum-Plasma Technology, Francisk Skorina Gomel State University. Е-mail: pdg_@mail.ru A.S. Rudenkov - Ph.D. (Eng.), Senior Research Scientist, International Chinese-Belarusian Scientific Laboratory on Vacuum-Plasma Technology, Francisk Skorina Gomel State University. Е-mail: arudenkov05@mail.ru A.V. Rogachev - Dr.Sc. (Chem.), Professor, International Chinese-Belarusian Scientific Laboratory on Vacuum-Plasma Technology, Francisk Skorina Gomel State University. Е-mail: rogachevav@mail.ru Xiao Hong Jiang - Ph.D. (Eng.), Professor, nternational Chinese-Belarusian Scientific Laboratory on Vacuum-Plasma Technology, Nanjing University of Science and Technology. Е-mail: jiangxh24@njust.edu.cn P.A. Luchnikov - Senior Research Scientist, Moscow Technological University. Е-mail: xamdex@gmail.com V.A. Emel’yanov - Dr.Sc. (Eng.), Professor, Joint Stock Company «Integral» (Minsk, Belarus)


It was found change of the properties, phase composition and mechanical properties of the carbon coating, subjected to ion nitriding. It is shown that ion nitriding is in the surface layers of increasing the share of sp2-phase with a decrease in the size of the clusters. It was found that the ion nitriding of carbon coatings are formed CNx connections to increase the number of the type of N-Csp2 bonds.
References:

 

  1. Majumdar A., Das S.C., Bogdanowicz R., Shripathi T., Langel W. Rainer Hippler, Role of nitrogen in evolution of sp2/sp3 bonding and optical band gap in hydrogenated carbon nitride // Vibrational Spectroscopy. 2013. V. 66. R. 63–68.
  2. Liu D.G., Tu J.P., Zhang H., Chen R., Gu C.D. Microstructure and mechanical properties of carbon nitride multilayer films deposited by DC magnetron sputtering. // Surf. Coat. Technol. 2011. V. 205. R. 3080–3086.
  3. Chen R., Tu J.P., Liu D.G., Yu Y.L., Qu S.X., Gu C.D. Structural and mechanical properties of TaN/a-CNx multilayer films //Surf. Coat. Technol. 2012. V. 206. R. 2242–2248.
  4. Voevodin A.A. Comparative study of wear-resistant DLC and fullerene-like CNxfilmsproduced by pulsed laser and filtered cathodic arc depositions // Surface &Films Technology. 2005. V. 197. P. 116–125.
  5. Broitman E. Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering // Wear. 2001. V. 248.P. 55–64.
  6. Liu A.Y., Cohen M.L.Prediction of new low compressibility solids // Science. 1989. V. 245. P. 841–842.
  7. Cohen M.L. Structural, electronic and optical properties of carbon nitride // Material Science Engineering A. 1995. V. 209. P. 1–4.
  8. Neidhardt J. Growth of fullerene-like carbon nitride thin solid films by reactive magnetron sputtering; role of low-energy ion irradiation in determining microstructure and mechanical properties // J. Appl. Phys. 2003. V. 93. P. 3002‒3014.
  9. Hellgren N. Role of nitrogen in the formation of hard and elastic CNx thin films by reactive magnetron sputtering // Phys. Rev. B. 1999. V. 59. P. 5162‒5169.
  10. Gammon W.J. Experimental comparison of N(1s) X-ray photoelectron spectroscopy binding energies of hard and elastic amorphous carbon nitride films with reference organic compounds //Sarbon. 2003. V. 41. P. 1917–1923.

 

May 29, 2020

© Издательство «РАДИОТЕХНИКА», 2004-2017            Тел.: (495) 625-9241                   Designed by [SWAP]Studio