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Methodology and methods of physico-chemical analysis in the development of technological processes of electronic component base

Keywords:

N.A. Tomilin – Dr. Sc. (Eng.), Head of Department, JSC «SPA «NIITAL» (Moscow) V.S. Seregin – Dr. Sc. (Eng.), General Director JSC «SPA «NIITAL» (Moscow) V.P. Marin – Academic APK, Dr. Sc. (Eng.), Professor, Moscow State University of Information Technologies, Radio Engineering and Electronics (MIREA) I.K. Kudryavtsev – Ph. D. (Phys.-Math.), Leading Research Scientist, Lomonosov Moscow State University (Москва) L.V. Pilavova – Ph. D. (Chem.), Deputy General Director, JSC «SPA «NIITAL» (Moscow) E.S. Pilavova – Leading Engineer, JSC «SPA «NIITAL» (Moscow). E-mail: info_niital@mail.ru


The results of multipurpose investigations of the composition, structure and properties of materials using modern methods of physico- chemical analysis are presented. The studies were performed in connection with the development of various technological processes to produce materials and components of electronic products (metallization technology of AlN ceramics, impregnated cathodes production technology). The results show the effectiveness of physico-chemical analysis methodology and methods in the development and control of technological processes of electronic component base production. The main modern physico-chemical analytical methods to investigate surfaces of different nature are scanning electron microscopy (SEM), X ray microanalysis, Auger electron spectroscopy (AES), X ray photoelectron spectroscopy (XPS) and mass spectrometry of the secondary ions (SIMS). Together with traditional methods we used the unique method to registrate true-color cathodoluminescence signal (color cathodoluminescence or CCL) as well. The choice of method was determined by the purpose of the research study. To develop metallization techology of AlN ceramics we needed information about the chemical and phase composition and the structure of the starting substrates, metallization layers formed and transition metal-ceramic region. The aim of the research of impregnated cathodes was chemical and phase composition control of the cathode surface and volume in the process of manufacturing and operation. The corresponding results are presented and discussed.
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May 29, 2020

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