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Aspects of heteroepitaxial growth processes for solid-state lighting applications

Keywords:

V.А. Burobin - Ph.D. (Eng.), General Director, JSC «GZ Pulsar». E-mail: burobin@gz-pulsar.ru А.Yu. Voloshin - Head SKB «FIR SE», JSC «GZ Pulsar». E-mail: anvo@yandex.ru N.I. Kargin - Dr.Sc. (Eng.), Professor, Vice Rector, National Research Nuclear University (NRNU MEPHI). E-mail: krgn@ya.ru А.А. Makarov - Leading Expert, JSC «GZ Pulsar». E-mail: a.makarov@gz-pulsar.ru А.А. Shchuka - Dr.Sc. (Eng.), Professor, Moscow Institute of Physics and Technology. E-mail: shchuka@mail.mipt.ru


In the article, a comparative analysis of substrate materials for heteroepitaxial growth of InGaN/GaN nanoheterostructures with multiple quantum wells used as lighting LEDs is conducted. Techniques of pre-epitaxial surface preparation of Si substrates and further approaches to eliminate the density of threading dislocations in GaN have been selected.
References:

 

  1. Burobin V.A., Konovalov A.M.Konstruktivno-tekhnologicheskie reshenija v proizvodstve jarkikh svetodiodov na osnove geterostruktur InGaN/GaN/AlGaN // Materialy I Mezhdunar. foruma po nanotekhnologijam. Moskva. 2008.3-5 dekabrja.
  2. Arendarenko A.A., Burobin V.A., Sveshnikov JU.N., Cyplenkov I.N. Puti razrabotki MOS-gidridnojj tekhnologii poluchenija geterostruktur na osnove nitrida gallija s nanorazmernymi oblastjami dlja svetoizluchajushhikh diodov // Materialy Imezhdunar. foruma po nanotekhnologijam. Moskva. 2008.3-5 dekabrja.
  3. Kargin N.I., Ryzhuk R.V., Konovalov A.M., Kuznecov A.L., Makarov A.A., Pavlov A.JU. Razrabotka ehnergoehffektivnogo svetilnika na osnove nanogeterostruktur InGaN/GaN/AlGaN // EHlektronnaja tekhnika. Serija 2: Poluprovodnikovyepribory. 2012. № 1. S. 90–94.
  4. Horng R. H. et al. Performance of GaN-based light-emitting diodes fabricated using GaN epilayers grown on silicon substrates // Optics Express. 2014. T. 22. № 101. S. A179‑A187.
  5. Burobin V.A. Reshenie problem ehnergosberezhenija. Vklad FGUP «GZ «Pulsar» // EHlektronika. Nauka. Tekhnologija. Biznes. 2009. №3. S. 48–51.
  6. Burobin V.A., Zverev A.V., JAkunin A.S. Korporativnaja dorozhnaja karta. Put krupnoserijjnomu proizvodstvu svetodiodov otkryt // EHlektronika. Nauka. Tekhnologija. Biznes. 2010. № 6.

 

June 24, 2020
May 29, 2020

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