V.E. Drach – Ph. D. (Eng.), Associate Professor, EIU1-KF, Kaluga branch of the Bauman MSTU. E-mail: firstname.lastname@example.org
A.V. Rodionov – Ph. D. (Eng.), Associate Professor, EIU2-KF, Kaluga branch of the Bauman MSTU. E-mail: email@example.com
CMOS technology is being developed fast and nowadays is being considered as an advanced means of manufacturing the ultra high frequency range devices. For years, various transient phenomena in MOS devices have been observed and been explained as the consequence of charge and/or discharge of the border traps, e.g. the hysteresis of the HFCV, the current spikes in the MOS capacitors, the current DLTS (deep level transient spectroscopy), the charge pumping current in the varied frequency charge pumping measurements, and various current transients, etc. These transient observations are used to study the nature of border traps and to estimate the effective density of border traps. In this paper, we report a new Id(Vg) shift phenomenon observed in high electrical-field stressed MOS transistors. Similar to the hysteresis observed in HFCV, we believe this observation is the result of the charging and/or discharging of border traps, and, in particular, the slow border traps. In this article, the Id(Vg) shift and the slow border trap are systematically studied, including the origin of the Id(Vg) shift, the physical nature and significance of the Id(Vg) shift, the charging characteristics and process of the slow border traps, influencing factors, and the parameters used to characterize the Id(Vg) shift. Finally, the possibility to use the Id(Vg) shift as a convenient tool to study the slow border traps and a degradation monitor is discussed. The main results and conclusions of this paper are confirmed by the gate geometry manifold of samples used in the experiments.
Fleetwood D. Border traps in MOS devices // IEEE
Trans. Nucl. Sci. 1992. V. NS‑39. P. 269−271.
Bauza D. Detection of slow traps in the oxide of MOS transistors by a new
current DLTS technique // Electronics
Lett. 1994. V. 30. P. 484−485.
Wang T., Chiang L.,
Zous N., et
al, Characterization of various stress-induced oxide traps in MOSFET's by using
a subthreshold transient current technique // IEEE Trans. Electron Dev. 1998. V. ED‑45. P. 1791−1796.
Scarpa A., Paccagnella A.,
Instability of post-Fowler-Nordheim stress measurements of MOS devices // Solid-State
Electron. 1997. V. 41, № 7. P. 935−938.
Drach V. Generation of positive charge in nano-size SiO2 films of MOS-structures
in presence of power field tunnel injection. // First Pan-Russian workshop of
students, post-graduates and young scientists in Nanoengineering. 2008. P.142
Drach V., Degradation of nano-sized short-channel MOS transistiors in presence
of high-power field injection // Proceedings of X international conferention of
students, post-graduates and young sicientists Technology&Systems‑2009. 2009.
Drach V., Chuhraev I.,
Method for monitoring of charge generation in nano-sized dielectirc of MOS
transistor // Science and education: electronic publication. 2012.№ 2. 77‑30569/332405.
8 Drach V., Chuhraev I., Smirnova O. Generation of charge in nano-sized dielectric transistor // Voprosy
Radioelectroniki, OT series. 2012. № 3.P. 115−122.