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Aspects of heteroepitaxial growth processes for solid-state lighting applications

Keywords:

V.А. Burobin – Ph.D. (Eng.), General Director, JSC «GZ Pulsar». E-mail: burobin@gz-pulsar.ru
А.Yu. Voloshin – Head SKB «FIR SE», JSC «GZ Pulsar». E-mail: anvo@yandex.ru
N.I. Kargin – Dr.Sc. (Eng.), Professor, Vice Rector, National Research Nuclear University (NRNU MEPHI). E-mail: krgn@ya.ru
А.А. Makarov – Leading Expert, JSC «GZ Pulsar». E-mail: a.makarov@gz-pulsar.ru
А.А. Shchuka – Dr.Sc. (Eng.), Professor, Moscow Institute of Physics and Technology. E-mail: shchuka@mail.mipt.ru


In the article, a comparative analysis of substrate materials for heteroepitaxial growth of InGaN/GaN nanoheterostructures with multiple quantum wells used as lighting LEDs is conducted. Techniques of pre-epitaxial surface preparation of Si substrates and further approaches to eliminate the density of threading dislocations in GaN have been selected.
References:

  1. Burobin V.A., Konovalov A.M. Konstruktivno-tehnologicheskie reshenija v proizvodstve jarkih svetodiodov na osnove geterostruktur InGaN/GaN/AlGaN // Materialy I Mezhdunar. foruma po nanotehnologijam. Moskva. 2008. 3-5 dekabrja.
  2. Arendarenko A.A., Burobin V.A., Sveshnikov Ju.N., Cyplenkov I.N. Puti razrabotki MOS-gidridnoj tehnologii poluchenija geterostruktur na osnove nitrida gallija s nanorazmernymi oblastjami dlja svetoizluchajushhih diodov // Materialy I mezhdunar. foruma po nanotehnologijam. Moskva. 2008. 3-5 dekabrja.
  3. Kargin N.I., Ryzhuk R.V., Konovalov A.M., Kuznecov A.L., Makarov A.A., Pavlov A.Ju. Razrabotka jenergojeffektivnogo svetil'nika na osnove nanogeterostruktur InGaN/GaN/AlGaN // Jelektronnaja tehnika. Serija 2: Poluprovodnikovye pribory. 2012. № 1. S. 90–94.
  4. Horng R. H. et al. Performance of GaN-based light-emitting diodes fabricated using GaN epilayers grown on silicon substrates // Optics Express. 2014. T. 22. № 101. S. A179–A187.
  5. Burobin V.A. Reshenie problem jenergosberezhenija. Vklad FGUP «GZ «Pul'sar» // Jelektronika. Nauka. Tehnologija. Biznes. 2009. № 3. S. 48–51.
  6. Burobin V.A., Zverev A.V., Jakunin A.S. Korporativnaja dorozhnaja karta. Put' krupnoserijnomu proizvodstvu svetodiodov otkryt // Jelektronika. Nauka. Tehnologija. Biznes. 2010. № 6.

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