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Nano-engineering in long wavelength wafer-fused VCSEL fabrication for microwave photonics


M. Belkin – Sc.Dr. (Eng.), Professor, Moscow State Technical University of Radio-Engineering, Electronics and Automation (MIREA), Russia. E-mail:
A. Sigov – Academician of Russian Academy of Sciences, President of Moscow State Technical University of Radio-Engineering, Electronics and Automation (MIREA), Russia
D. Ellafi – Sc.Dr., École Nationale D’ingenieur de Tunis, Republic of Tunissia
V. Iakovlev – Sc.Dr., Senior Research Scientist, École Polytechnique Fédérale de Lausanne, Switzerland
E. Kapon – Sc.Dr., Professor, École Polytechnique Fédérale de Lausanne, Switzerland

We address the challenge of increasing the direct modulation bandwidth for practical applications of next generation microwave photonics telecom and radar systems using long-wavelength vertical cavity surface emitting lasers (LW-VCSELs). Several demonstrations of new concepts of cost- and power effective LW-VCSEL-based microwave photonics devices with competitive features are presented and discussed.The dramatic impact of the nanometer accuracy in fabrication of the VCSEL on the static and dynamic performance,as well as the extraction of internal VCSEL parameters by performing digital etching with atomic resolution is demonstrated.

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