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Technological control of element structure perovskite layer of planar nano structures deposited in HF-plasma

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M.S. Afanas’ev V.K Egorov, P.A.Lychnikov, A.V.Byrov, G.V. Chucheva


The Ba1-xSrxTiO3 (BSTO) thin films were investigated on single-crystal substrates Si [100], MgO [100] and NdGaO3 [100] by the methods of Rutherford helium ion backscattering. The article considered the features of Rutherford backscattering (RBS) spectroscopy and its expected result at the analysis of Ba1-xSrxTiO3 (BSTO) thin films on single-crystal substrates. Using RBS method barium-strontium-titanium (Ba1-xSrxTiO3) films on various substrates are studied. The authors determined the degree of the film thickness elemental heterogeneity and the level of substrate diffusive impurity by the atoms.
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