M.S. Afanas’ev V.K Egorov, P.A.Lychnikov, A.V.Byrov, G.V. Chucheva
The Ba1-xSrxTiO3 (BSTO) thin films were investigated on single-crystal substrates Si , MgO  and NdGaO3  by the methods of Rutherford helium ion backscattering. The article considered the features of Rutherford backscattering (RBS) spectroscopy and its expected result at the analysis of Ba1-xSrxTiO3 (BSTO) thin films on single-crystal substrates. Using RBS method barium-strontium-titanium (Ba1-xSrxTiO3) films on various substrates are studied. The authors determined the degree of the film thickness elemental heterogeneity and the level of substrate diffusive impurity by the atoms.