Yu.A. Chaplygin, Yu.F. Kozlov, V.I. Grafutin, S.P. Timoshenkov, E.P. Prokopiev, Yu.V. Funtikov
It is shown that one of the most effective methods of determining the size of nano-objects (vacancies, vacancy clusters), the volume of free pores, cavities, voids, their concentrations and chemical composition at the site of annihilation in porous systems and some of the defective materials, especially nanomaterials is the method of positron annihilation spectroscopy (PAS .) A brief review of experimental studies nanodefects in quartz, quartz powder, porous silicon, silicon and metals and alloys irradiated with protons. Particular attention is given to the method of positron beam spectroscopy. Considered the development and application of positron annihilation spectroscopy to nanotechnology as one of the most effective methods of determining the size of spherical and cylindrical nano-objects: the free volume of pores, cavities, voids, and their concentrations in porous systems and some of the defective materials. The results of experimental studies on the characterization of spherical and cylindrical nanodefects in porous silicon and silicon wafers were irradiated with protons.